Terry L. Alford,
L.C. Feldman,
James W. Mayer
Springer US
0e druk, 2010
9781441939807
Fundamentals of Nanoscale Film Analysis
Specificaties
Paperback, 336 blz.
|
Engels
Springer US |
0e druk, 2010
ISBN13: 9781441939807
Rubricering
Levertijd ongeveer 8 werkdagen
Samenvatting
From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.
Specificaties
ISBN13:9781441939807
Taal:Engels
Bindwijze:paperback
Aantal pagina's:336
Uitgever:Springer US
Druk:0
Inhoudsopgave
An Overview: Concepts, Units, and the Bohr Atom.- Atomic Collisions and Backscattering Spectrometry.- Energy Loss of Light Ions and Backscattering Depth Profiles.- Sputter Depth Profiles and Secondary Ion Mass Spectroscopy.- Ion Channeling.- Electron-Electron Interactions and the Depth Sensitivity of Electron Spectroscopies.- X-ray Diffraction.- Electron Diffraction.- Photon Absorption in Solids and EXAFS.- X-ray Photoelectron Spectroscopy.- Radiative Transitions and the Electron Microprobe.- Nonradiative Transitions and Auger Electron Spectroscopy.- Nuclear Techniques: Activation Analysis and Prompt Radiation Analysis.- Scanning Probe Microscopy.