Nanolithography and Surface Microscopy with Electron Beams

Specificaties
Gebonden, blz. | Engels
Elsevier Science | e druk, 2024
ISBN13: 9780443314629
Rubricering
Elsevier Science e druk, 2024 9780443314629
€ 219,75
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Samenvatting

Nanolithography and Surface Microscopy with Electron Beams, Volume 231 merges two long-running serials, Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. The series features articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science, digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains. Specific chapters cover Introduction to inverse problems in electron microscopy, Directional sinogram inpainting for limited angle tomography, Strain tomography of crystals, FISTA with adaptive discretization, Total variation discretization, and Reconstruction with a Gaussian Dictionary.

Specificaties

ISBN13:9780443314629
Taal:Engels
Bindwijze:Gebonden

Inhoudsopgave

Introduction and Summary<br>Lord Broers<br>1. Early life<br>Lord Broers<br>2. Modification of an SEM/Ion beam system to improve the resolution and reliability of the SEM and remove oxygen ions from the ion beam<br>Lord Broers<br>3. Formation of cones and ridges on ion-etched surfaces<br>Lord Broers<br>4. Microfabrication in an SEM<br>Lord Broers<br>5. High Resolution Short Focal Length Lens Electron Probe<br>Lord Broers<br>6. Low-Loss Surface Microscopy in short focal length Probe<br>Lord Broers<br>7. Microfabrication in the 5Å electron probe<br>Lord Broers<br>8. Nanodevices fabricated in the HR Probe<br>Lord Broers<br>9. Fabrication of Structures with Dimensions Below 10 nm<br>Lord Broers<br>10. Semiconductor Lithography and Processing<br>Lord Broers<br>11. Nanolithography at 400kV<br>Lord Broers<br>12. Last twenty years and future of semiconductor chips<br>Lord Broers
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        Nanolithography and Surface Microscopy with Electron Beams