Kirill Poletkin
Springer International Publishing
e druk, 2021
9783030589103
Levitation Micro-Systems
Applications to Sensors and Actuators
Specificaties
Paperback, blz.
|
Engels
Springer International Publishing |
e druk, 2021
ISBN13: 9783030589103
Rubricering
Onderdeel van serie
Microsystems and Nanosystems
Levertijd ongeveer 8 werkdagen
Samenvatting
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
Specificaties
ISBN13:9783030589103
Taal:Engels
Bindwijze:paperback
Uitgever:Springer International Publishing
Inhoudsopgave
Introduction to levitation micro-systems.- Micro-fabrication techniques.- Analytical modelling.- Quasi-finite element modelling.- Inductive levitation micro-systems.- Hybrid levitation micro-systems.- Mechanical thermal noise in levitated micro-gyroscopes.