E Defaÿ
John Wiley & Sons
e druk, 2011
9781848212398
Integration of Ferroelectric and Piezoelectric Thin Films – Concepts ans Applications for Microsystems
Concepts and Applications for Microsystems
Specificaties
Gebonden, 422 blz.
|
Engels
John Wiley & Sons |
e druk, 2011
ISBN13: 9781848212398
Rubricering
Onderdeel van serie
ISTE
Verwachte levertijd ongeveer 9 werkdagen
Samenvatting
This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo–pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.
Specificaties
ISBN13:9781848212398
Taal:Engels
Bindwijze:gebonden
Aantal pagina's:422
Uitgever:John Wiley & Sons
Serie:ISTE
Inhoudsopgave
<p>Preface xiii<br /> Emmanuel DEFA </p>
<p>General Introduction xvii</p>
<p>Chapter 1. Dielectricity, Piezoelectricity, Pyroelectricity and Ferroelectricity 1<br /> Emmanuel DEFA </p>
<p>1.1. Crystal structure 1</p>
<p>1.2. Piezoelectricity, pyroelectricity and ferroelectricity definitions 9</p>
<p>1.3. Simplified examples 10</p>
<p>1.4. Three typical structures: wurtzite, ilmenite and perovskite 16</p>
<p>1.5. Bibliography 23</p>
<p>Chapter 2. Thermodynamic Study: a Structural Approach 25<br /> Emmanuel DEFA </p>
<p>2.1. History 25</p>
<p>2.2. Revisiting statistical thermodynamics 26</p>
<p>2.3. State functions 41</p>
<p>2.4. Linear equations ?npiezoelectricity 44</p>
<p>2.5. Non linear equations ?nelectrostriction 47</p>
<p>2.6. Bibliography 48</p>
<p>Chapter 3. Ferroelectric–paraelectric Phase Transition Thermodynamic Modeling 49<br /> Emmanuel DEFA </p>
<p>3.1. Hypothesis on Gibbs elastic energy 49</p>
<p>3.2. Second–order transition 52</p>
<p>3.3. Effects of stresses 58</p>
<p>3.4. First–order transition 60</p>
<p>3.5. Conclusion 65</p>
<p>3.6. Bibliography 65</p>
<p>Chapter 4. Mechanical Formalism 67<br /> Emmanuel DEFA </p>
<p>4.1. Introduction 67</p>
<p>4.2. Hooke s law 67</p>
<p>4.3. Definitions of local strains 69</p>
<p>4.4. Definition of local strains 77</p>
<p>4.5. Stress–strain relation 83</p>
<p>4.6. Elastic energy density 86</p>
<p>4.7. Expression of the elasticity tensor as a function of elements of symmetry 89</p>
<p>4.8. Bibliography 93</p>
<p>Chapter 5. Dielectric Formalism 95<br /> Emmanuel DEFA </p>
<p>5.1. Introduction 95</p>
<p>5.2. The dielectric effect seen by Faraday 95</p>
<p>5.3. Electric polarization and displacement 99</p>
<p>5.4. The dielectric constant 104</p>
<p>5.5. The local field in dielectrics: polarization catastrophe 105</p>
<p>5.6. Dielectric relaxation 109</p>
<p>5.7. Electric energy density 115</p>
<p>5.8. Bibliography 117</p>
<p>Chapter 6. Piezoelectric Formalism 119<br /> Emmanuel DEFA and Mathieu PIJOLAT</p>
<p>6.1. Thermodynamic equations 119</p>
<p>6.2. Reducing coefficients using crystal symmetry 121</p>
<p>6.3. One–dimensional microscopic model 126</p>
<p>6.4. Electromechanical coupling coefficient 130</p>
<p>6.5. Piezoelectric coefficients of key materials 134</p>
<p>6.6. Calculating coupling as a function of crystal orientation 136</p>
<p>6.7. Piezoelectric coefficients in the case of ferroelectric materials 138</p>
<p>6.8. Relation between piezoelectric formalism and matter 139</p>
<p>6.9. Bibliography 141</p>
<p>Chapter 7. Acoustic Formalism 143<br /> Alexandre REINHARDT</p>
<p>7.1. Propagation of bulk waves 143</p>
<p>7.2. Bulk wave resonator 163</p>
<p>7.3. Bulk acoustic waves filter 185</p>
<p>7.4. Bibliography 190</p>
<p>Chapter 8. Electrostrictive Formalism 191<br /> Emmanuel DEFA </p>
<p>8.1. Foundations of electrostriction 191</p>
<p>8.2. Thermodynamic model of electrostriction case of the resonator 192</p>
<p>8.3. The electrostriction tensor 195</p>
<p>8.4. Microscopic model of electrostriction 197</p>
<p>8.5. Electrostrictive resonator 202</p>
<p>8.6. Bibliography 206</p>
<p>Chapter 9. Electric Characterization 207<br /> Emmanuel DEFA , Gwenaël LE RHUN and Emilien BOUYSSOU</p>
<p>9.1. Static piezoelectric characterization of thin films 207</p>
<p>9.2. Piezoelectric and atomic force microscopy 215</p>
<p>9.3. Ferroelectric measurement 225</p>
<p>9.4. Dielectric measurement 232</p>
<p>9.5. Leakage current in metal/insulator/metal structures 236</p>
<p>9.6. Bibliography 245</p>
<p>Chapter 10. Piezoelectric Resonators and Filters 249<br /> Alexandre REINHARDT and Christophe BILLARD</p>
<p>10.1. Acoustic resonators: principle and history 249</p>
<p>10.2. BAW technology 269</p>
<p>10.3. CRF technology 283</p>
<p>10.4. Bibliography 291</p>
<p>Chapter 11. High Overtone Bulk Acoustic Resonator (HBAR) 297<br /> Mathieu PIJOLAT, Chrystel DEGUET and Sylvain BALLANDRAS</p>
<p>11.1. About HBAR 297</p>
<p>11.2. Technology 302</p>
<p>11.3. Examples of implementations 305</p>
<p>11.4. Conclusions about HBAR 312</p>
<p>11.5. Bibliography 313</p>
<p>Chapter 12. Electrostrictive Resonators 315<br /> Alexandre VOLATIER, Brice IVIRA, Christophe ZINCK, Nizar BEN HASSINE and Emmanuel DEFA </p>
<p>12.1. Introduction 315</p>
<p>12.2. State of the art 316</p>
<p>12.3. Experimental implementations 326</p>
<p>12.4. Simulation of a filter with electrostrictive resonators 341</p>
<p>12.5. Status of perovskite electrostrictive resonators 342</p>
<p>12.6. PZT–based tunable frequency ferroelectric acoustic resonator 344</p>
<p>12.7. Nonlinear effect in piezoelectric AlN 348</p>
<p>12.8. Conclusion with electrostriction 354</p>
<p>12.9. Bibliography 355</p>
<p>Chapter 13. Thin Film Piezoelectric Transducers 357<br /> Matthieu CUEFF, Patrice REY, Fabien FILHOL and Emmanuel DEFA </p>
<p>13.1. Introduction 357</p>
<p>13.2. State of the art 358</p>
<p>13.3. Resonant membranes 361</p>
<p>13.4. Resonant micromirror 366</p>
<p>13.5. Piezoelectric micro–switch 371</p>
<p>13.6. Sign of piezoelectric coefficients 391</p>
<p>13.7. Bibliography 394</p>
<p>List of Authors 397</p>
<p>Index 399</p>
<p>General Introduction xvii</p>
<p>Chapter 1. Dielectricity, Piezoelectricity, Pyroelectricity and Ferroelectricity 1<br /> Emmanuel DEFA </p>
<p>1.1. Crystal structure 1</p>
<p>1.2. Piezoelectricity, pyroelectricity and ferroelectricity definitions 9</p>
<p>1.3. Simplified examples 10</p>
<p>1.4. Three typical structures: wurtzite, ilmenite and perovskite 16</p>
<p>1.5. Bibliography 23</p>
<p>Chapter 2. Thermodynamic Study: a Structural Approach 25<br /> Emmanuel DEFA </p>
<p>2.1. History 25</p>
<p>2.2. Revisiting statistical thermodynamics 26</p>
<p>2.3. State functions 41</p>
<p>2.4. Linear equations ?npiezoelectricity 44</p>
<p>2.5. Non linear equations ?nelectrostriction 47</p>
<p>2.6. Bibliography 48</p>
<p>Chapter 3. Ferroelectric–paraelectric Phase Transition Thermodynamic Modeling 49<br /> Emmanuel DEFA </p>
<p>3.1. Hypothesis on Gibbs elastic energy 49</p>
<p>3.2. Second–order transition 52</p>
<p>3.3. Effects of stresses 58</p>
<p>3.4. First–order transition 60</p>
<p>3.5. Conclusion 65</p>
<p>3.6. Bibliography 65</p>
<p>Chapter 4. Mechanical Formalism 67<br /> Emmanuel DEFA </p>
<p>4.1. Introduction 67</p>
<p>4.2. Hooke s law 67</p>
<p>4.3. Definitions of local strains 69</p>
<p>4.4. Definition of local strains 77</p>
<p>4.5. Stress–strain relation 83</p>
<p>4.6. Elastic energy density 86</p>
<p>4.7. Expression of the elasticity tensor as a function of elements of symmetry 89</p>
<p>4.8. Bibliography 93</p>
<p>Chapter 5. Dielectric Formalism 95<br /> Emmanuel DEFA </p>
<p>5.1. Introduction 95</p>
<p>5.2. The dielectric effect seen by Faraday 95</p>
<p>5.3. Electric polarization and displacement 99</p>
<p>5.4. The dielectric constant 104</p>
<p>5.5. The local field in dielectrics: polarization catastrophe 105</p>
<p>5.6. Dielectric relaxation 109</p>
<p>5.7. Electric energy density 115</p>
<p>5.8. Bibliography 117</p>
<p>Chapter 6. Piezoelectric Formalism 119<br /> Emmanuel DEFA and Mathieu PIJOLAT</p>
<p>6.1. Thermodynamic equations 119</p>
<p>6.2. Reducing coefficients using crystal symmetry 121</p>
<p>6.3. One–dimensional microscopic model 126</p>
<p>6.4. Electromechanical coupling coefficient 130</p>
<p>6.5. Piezoelectric coefficients of key materials 134</p>
<p>6.6. Calculating coupling as a function of crystal orientation 136</p>
<p>6.7. Piezoelectric coefficients in the case of ferroelectric materials 138</p>
<p>6.8. Relation between piezoelectric formalism and matter 139</p>
<p>6.9. Bibliography 141</p>
<p>Chapter 7. Acoustic Formalism 143<br /> Alexandre REINHARDT</p>
<p>7.1. Propagation of bulk waves 143</p>
<p>7.2. Bulk wave resonator 163</p>
<p>7.3. Bulk acoustic waves filter 185</p>
<p>7.4. Bibliography 190</p>
<p>Chapter 8. Electrostrictive Formalism 191<br /> Emmanuel DEFA </p>
<p>8.1. Foundations of electrostriction 191</p>
<p>8.2. Thermodynamic model of electrostriction case of the resonator 192</p>
<p>8.3. The electrostriction tensor 195</p>
<p>8.4. Microscopic model of electrostriction 197</p>
<p>8.5. Electrostrictive resonator 202</p>
<p>8.6. Bibliography 206</p>
<p>Chapter 9. Electric Characterization 207<br /> Emmanuel DEFA , Gwenaël LE RHUN and Emilien BOUYSSOU</p>
<p>9.1. Static piezoelectric characterization of thin films 207</p>
<p>9.2. Piezoelectric and atomic force microscopy 215</p>
<p>9.3. Ferroelectric measurement 225</p>
<p>9.4. Dielectric measurement 232</p>
<p>9.5. Leakage current in metal/insulator/metal structures 236</p>
<p>9.6. Bibliography 245</p>
<p>Chapter 10. Piezoelectric Resonators and Filters 249<br /> Alexandre REINHARDT and Christophe BILLARD</p>
<p>10.1. Acoustic resonators: principle and history 249</p>
<p>10.2. BAW technology 269</p>
<p>10.3. CRF technology 283</p>
<p>10.4. Bibliography 291</p>
<p>Chapter 11. High Overtone Bulk Acoustic Resonator (HBAR) 297<br /> Mathieu PIJOLAT, Chrystel DEGUET and Sylvain BALLANDRAS</p>
<p>11.1. About HBAR 297</p>
<p>11.2. Technology 302</p>
<p>11.3. Examples of implementations 305</p>
<p>11.4. Conclusions about HBAR 312</p>
<p>11.5. Bibliography 313</p>
<p>Chapter 12. Electrostrictive Resonators 315<br /> Alexandre VOLATIER, Brice IVIRA, Christophe ZINCK, Nizar BEN HASSINE and Emmanuel DEFA </p>
<p>12.1. Introduction 315</p>
<p>12.2. State of the art 316</p>
<p>12.3. Experimental implementations 326</p>
<p>12.4. Simulation of a filter with electrostrictive resonators 341</p>
<p>12.5. Status of perovskite electrostrictive resonators 342</p>
<p>12.6. PZT–based tunable frequency ferroelectric acoustic resonator 344</p>
<p>12.7. Nonlinear effect in piezoelectric AlN 348</p>
<p>12.8. Conclusion with electrostriction 354</p>
<p>12.9. Bibliography 355</p>
<p>Chapter 13. Thin Film Piezoelectric Transducers 357<br /> Matthieu CUEFF, Patrice REY, Fabien FILHOL and Emmanuel DEFA </p>
<p>13.1. Introduction 357</p>
<p>13.2. State of the art 358</p>
<p>13.3. Resonant membranes 361</p>
<p>13.4. Resonant micromirror 366</p>
<p>13.5. Piezoelectric micro–switch 371</p>
<p>13.6. Sign of piezoelectric coefficients 391</p>
<p>13.7. Bibliography 394</p>
<p>List of Authors 397</p>
<p>Index 399</p>