Scanning Probe Lithography

Introduces historical background of SPL, including evolution of the technique and tools
Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied
Shows the different types of devices and structures fabricated by SPL, together with the processing steps
Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups
Summarizes strengths, limitations, and potential of SPL