Vivek Bakshi
John Wiley & Sons Inc
e druk, 2009
9780470471555
EUV Lithography
Specificaties
Gebonden, 702 blz.
|
EN
John Wiley & Sons Inc |
e druk, 2009
ISBN13: 9780470471555
Rubricering
Levertijd ongeveer 15 werkdagen
Samenvatting
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
Specificaties
ISBN13:9780470471555
Taal:EN
Bindwijze:Gebonden
Aantal pagina's:702
Uitgever:John Wiley & Sons Inc