Lucille A. Giannuzzi,
North Carolina State University
Springer US
2005e druk, 2004
9780387231167
Introduction to Focused Ion Beams
Instrumentation, Theory, Techniques and Practice
Specificaties
Gebonden, 358 blz.
|
Engels
Springer US |
2005e druk, 2004
ISBN13: 9780387231167
Rubricering
Levertijd ongeveer 8 werkdagen
Samenvatting
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Specificaties
ISBN13:9780387231167
Taal:Engels
Bindwijze:gebonden
Aantal pagina's:358
Uitgever:Springer US
Druk:2005
Inhoudsopgave
The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.