Ohmi,
Tadahiro Ohmi
CRC Press
1e druk, 2020
9780367402341
Ultra-Clean Technology Handbook
Volume 1: Ultra-Pure Water
Specificaties
Paperback, 944 blz.
|
Engels
CRC Press |
1e druk, 2020
ISBN13: 9780367402341
Rubricering
Levertijd ongeveer 10 werkdagen
Samenvatting
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.