Wei Gao
Elsevier Science
e druk, 2020
9780128178508
Surface Metrology for Micro- and Nanofabrication
Specificaties
Paperback, blz.
|
Engels
Elsevier Science |
e druk, 2020
ISBN13: 9780128178508
Rubricering
Onderdeel van serie
Micro and Nano Technologies
Levertijd ongeveer 8 werkdagen
Samenvatting
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
Specificaties
Inhoudsopgave
<p>1. Noncontact Scanning Electrostatic Force Microscope2. Quartz Tuning Fork Atomic Force Microscope3. Micropipette Ball Probing System4. Low-Force Elastic Beam Surface Profiler5. Linear-Scan Micro Roundness Measuring Machine6. Micro-Gear Measuring Machine7. On-Machine Length Gauge Surface Profiler8. On-Machine Air-Bearing Surface Profiler9. On-Machine Atomic Force Microscope10. On-Machine Roll Profiler11. In-Process Fast Tool Servo Profiler12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness</p>